env{ keywords{D0,2.4GeV} } comments{SLS D0-mode: old standard low emittance (5 nm)} data{ ARIMA-OPTIC:NAME-NOM.VAL{value{data{D0}} sevr{NO_ALARM}} ARIMA-OPTIC:E-NOM.VAL{value{data{2.4}} sevr{NO_ALARM}} ARIMA-OPTIC:QX-NOM.VAL{value{data{20.82}} sevr{NO_ALARM}} ARIMA-OPTIC:QY-NOM.VAL{value{data{7.079997}} sevr{NO_ALARM}} ARIMA-OPTIC:CX-NOM.VAL{value{data{1.0}} sevr{NO_ALARM}} ARIMA-OPTIC:CY-NOM.VAL{value{data{1.0}} sevr{NO_ALARM}} ARIMA-OPTIC:QFX-FCTR.VAL{value{data{0.0124092}} sevr{NO_ALARM}} ARIMA-OPTIC:QFY-FCTR.VAL{value{data{0.0052774}} sevr{NO_ALARM}} ARIMA-OPTIC:QDX-FCTR.VAL{value{data{0.0074099}} sevr{NO_ALARM}} ARIMA-OPTIC:QDY-FCTR.VAL{value{data{0.0263604}} sevr{NO_ALARM}} ARIMA-OPTIC:SFX-FCTR.VAL{value{data{0.0470969}} sevr{NO_ALARM}} ARIMA-OPTIC:SFY-FCTR.VAL{value{data{0.0297441}} sevr{NO_ALARM}} ARIMA-OPTIC:SDX-FCTR.VAL{value{data{0.0453028}} sevr{NO_ALARM}} ARIMA-OPTIC:SDY-FCTR.VAL{value{data{0.1456069}} sevr{NO_ALARM}} ARIMA-QLH:I-NOM.VAL{value{data{76.57128769467714}} sevr{NO_ALARM}} ARIMA-QLH:B_I-GRAD.VAL{value{data{0.9980257538579843}} sevr{NO_ALARM}} ARIMA-QLG:I-NOM.VAL{value{data{73.17957651329704}} sevr{NO_ALARM}} ARIMA-QLG:B_I-GRAD.VAL{value{data{0.9989968435633302}} sevr{NO_ALARM}} ARIMA-QLF:I-NOM.VAL{value{data{85.87079579191766}} sevr{NO_ALARM}} ARIMA-QLF:B_I-GRAD.VAL{value{data{0.9960325641352429}} sevr{NO_ALARM}} ARIMA-QLE:I-NOM.VAL{value{data{21.700103941133168}} sevr{NO_ALARM}} ARIMA-QLE:B_I-GRAD.VAL{value{data{0.9999999968969564}} sevr{NO_ALARM}} ARIMA-QLD:I-NOM.VAL{value{data{78.54799321816701}} sevr{NO_ALARM}} ARIMA-QLD:B_I-GRAD.VAL{value{data{0.9981427942686295}} sevr{NO_ALARM}} ARIMA-QLCW:I-NOM.VAL{value{data{82.38415805543275}} sevr{NO_ALARM}} ARIMA-QLCW:B_I-GRAD.VAL{value{data{0.997705917877993}} sevr{NO_ALARM}} ARIMA-QLBN:I-NOM.VAL{value{data{46.95164978695444}} sevr{NO_ALARM}} ARIMA-QLBN:B_I-GRAD.VAL{value{data{0.9999831602403546}} sevr{NO_ALARM}} ARIMA-QLAN:I-NOM.VAL{value{data{58.89730212650607}} sevr{NO_ALARM}} ARIMA-QLAN:B_I-GRAD.VAL{value{data{0.9998774699817159}} sevr{NO_ALARM}} ARIMA-QSAW:I-NOM.VAL{value{data{59.22810585850605}} sevr{NO_ALARM}} ARIMA-QSAW:B_I-GRAD.VAL{value{data{0.9999664473248737}} sevr{NO_ALARM}} ARIMA-QSBW:I-NOM.VAL{value{data{38.178265539596914}} sevr{NO_ALARM}} ARIMA-QSBW:B_I-GRAD.VAL{value{data{0.9999976753447459}} sevr{NO_ALARM}} ARIMA-QSCN:I-NOM.VAL{value{data{89.54530067864057}} sevr{NO_ALARM}} ARIMA-QSCN:B_I-GRAD.VAL{value{data{0.9943127264380812}} sevr{NO_ALARM}} ARIMA-QSD:I-NOM.VAL{value{data{95.18214661292667}} sevr{NO_ALARM}} ARIMA-QSD:B_I-GRAD.VAL{value{data{0.9892666746608527}} sevr{NO_ALARM}} ARIMA-QSE:I-NOM.VAL{value{data{2.307381136585366}} sevr{NO_ALARM}} ARIMA-QSE:B_I-GRAD.VAL{value{data{1.0}} sevr{NO_ALARM}} ARIMA-QSF:I-NOM.VAL{value{data{99.24379787478877}} sevr{NO_ALARM}} ARIMA-QSF:B_I-GRAD.VAL{value{data{0.986243662931892}} sevr{NO_ALARM}} ARIMA-QSG:I-NOM.VAL{value{data{63.0946328496119}} sevr{NO_ALARM}} ARIMA-QSG:B_I-GRAD.VAL{value{data{0.9997197191031217}} sevr{NO_ALARM}} ARIMA-QSCW:I-NOM.VAL{value{data{89.5064004106015}} sevr{NO_ALARM}} ARIMA-QSCW:B_I-GRAD.VAL{value{data{0.995163365009916}} sevr{NO_ALARM}} ARIMA-QSBN:I-NOM.VAL{value{data{38.09324796666822}} sevr{NO_ALARM}} ARIMA-QSBN:B_I-GRAD.VAL{value{data{0.999997508856427}} sevr{NO_ALARM}} ARIMA-QSAN:I-NOM.VAL{value{data{58.89730212650607}} sevr{NO_ALARM}} ARIMA-QSAN:B_I-GRAD.VAL{value{data{0.9998774699817159}} sevr{NO_ALARM}} ARIMA-QMAW:I-NOM.VAL{value{data{49.396110478452556}} sevr{NO_ALARM}} ARIMA-QMAW:B_I-GRAD.VAL{value{data{0.9999967378268327}} sevr{NO_ALARM}} ARIMA-QMBW:I-NOM.VAL{value{data{35.02626868522287}} sevr{NO_ALARM}} ARIMA-QMBW:B_I-GRAD.VAL{value{data{0.9999989532861764}} sevr{NO_ALARM}} ARIMA-QMCN:I-NOM.VAL{value{data{89.99373910896594}} sevr{NO_ALARM}} ARIMA-QMCN:B_I-GRAD.VAL{value{data{0.9940632754287927}} sevr{NO_ALARM}} ARIMA-QMD:I-NOM.VAL{value{data{90.58615596385592}} sevr{NO_ALARM}} ARIMA-QMD:B_I-GRAD.VAL{value{data{0.9931681096262842}} sevr{NO_ALARM}} ARIMA-QME:I-NOM.VAL{value{data{20.38809906960162}} sevr{NO_ALARM}} ARIMA-QME:B_I-GRAD.VAL{value{data{0.9999999983979133}} sevr{NO_ALARM}} ARIMA-QMF:I-NOM.VAL{value{data{92.82499517165078}} sevr{NO_ALARM}} ARIMA-QMF:B_I-GRAD.VAL{value{data{0.9922530371579135}} sevr{NO_ALARM}} ARIMA-QMG:I-NOM.VAL{value{data{57.46972333589849}} sevr{NO_ALARM}} ARIMA-QMG:B_I-GRAD.VAL{value{data{0.9998931647594209}} sevr{NO_ALARM}} ARIMA-QMCW:I-NOM.VAL{value{data{89.95430182811499}} sevr{NO_ALARM}} ARIMA-QMCW:B_I-GRAD.VAL{value{data{0.9949412872495024}} sevr{NO_ALARM}} ARIMA-QMBN:I-NOM.VAL{value{data{34.95135815318886}} sevr{NO_ALARM}} ARIMA-QMBN:B_I-GRAD.VAL{value{data{0.9999988657479596}} sevr{NO_ALARM}} ARIMA-QMAN:I-NOM.VAL{value{data{49.129838908829704}} sevr{NO_ALARM}} ARIMA-QMAN:B_I-GRAD.VAL{value{data{0.9999820714872631}} sevr{NO_ALARM}} ARIMA-QLAW:I-NOM.VAL{value{data{59.22810585850605}} sevr{NO_ALARM}} ARIMA-QLAW:B_I-GRAD.VAL{value{data{0.9999664473248737}} sevr{NO_ALARM}} ARIMA-QLBW:I-NOM.VAL{value{data{47.06516260825316}} sevr{NO_ALARM}} ARIMA-QLBW:B_I-GRAD.VAL{value{data{0.999983858731128}} sevr{NO_ALARM}} ARIMA-QLCN:I-NOM.VAL{value{data{82.41599847049572}} sevr{NO_ALARM}} ARIMA-QLCN:B_I-GRAD.VAL{value{data{0.9972125425099867}} sevr{NO_ALARM}} ARIMA-SLB:I-NOM.VAL{value{data{37.78503735342525}} sevr{NO_ALARM}} ARIMA-SLB:B_I-GRAD.VAL{value{data{0.999999100459244}} sevr{NO_ALARM}} ARIMA-SLA:I-NOM.VAL{value{data{88.97314628252992}} sevr{NO_ALARM}} ARIMA-SLA:B_I-GRAD.VAL{value{data{0.997678647075089}} sevr{NO_ALARM}} ARIMA-SE:I-NOM.VAL{value{data{21.894786374833792}} sevr{NO_ALARM}} ARIMA-SE:B_I-GRAD.VAL{value{data{0.999999999987385}} sevr{NO_ALARM}} ARIMA-SF:I-NOM.VAL{value{data{54.74881208913435}} sevr{NO_ALARM}} ARIMA-SF:B_I-GRAD.VAL{value{data{0.999972972889077}} sevr{NO_ALARM}} ARIMA-SD:I-NOM.VAL{value{data{56.186031432581956}} sevr{NO_ALARM}} ARIMA-SD:B_I-GRAD.VAL{value{data{0.9999657187671934}} sevr{NO_ALARM}} ARIMA-SSA:I-NOM.VAL{value{data{87.74822563812884}} sevr{NO_ALARM}} ARIMA-SSA:B_I-GRAD.VAL{value{data{0.9979553124041755}} sevr{NO_ALARM}} ARIMA-SSB:I-NOM.VAL{value{data{55.54559254388304}} sevr{NO_ALARM}} ARIMA-SSB:B_I-GRAD.VAL{value{data{0.9999691415240325}} sevr{NO_ALARM}} ARIMA-SMA:I-NOM.VAL{value{data{40.77542708191532}} sevr{NO_ALARM}} ARIMA-SMA:B_I-GRAD.VAL{value{data{0.9999981905761675}} sevr{NO_ALARM}} ARIMA-SMB:I-NOM.VAL{value{data{32.55194650527218}} sevr{NO_ALARM}} ARIMA-SMB:B_I-GRAD.VAL{value{data{0.9999997709344411}} sevr{NO_ALARM}} }